silicon carbide Ceramic effector for the transfer of wafers in various semiconductor processes

Characteristics and advantages

1.Precise dimensions and thermal stability

2.High specific stiffness and excellent thermal uniformity, long-term use is not easy to bend deformation;

3.It has a smooth surface and good wear resistance, thus safely handling the chip without particle contamination.

4.Silicon carbide resistivity in 106-108Ω, non-magnetic, in line with anti-ESD specification requirements; It can prevent the accumulation of static electricity on the surface of the chip

5.Good thermal conductivity, low expansion coefficient.