Semiconductor Second Half Parts for Epitaxial

Short Description:

SiC coated graphite parts for SiC epitaxial equipment.

Product introduction and use: Connected quartz tube, can pass gas to drive the tray base rotation, temperature control

Device location of the product: in the reaction chamber, not in direct contact with the wafer

Main downstream products: power devices

Main terminal market: new energy vehicles

Product Detail

Product Tags

SiC Coated Graphite Halfmoon Part is a key component used in semiconductor manufacturing processes, especially for SiC epitaxial equipment. We use our patented technology to make the halfmoon part with extremely high purity, good coating uniformity and an excellent service life, as well as high chemical resistance and thermal stability properties.

Semicera Work place
Semicera work place 2
Equipment machine
CNN processing, chemical cleaning, CVD coating
Our service

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