Introduction to CFC
The components manufactured from our CFC materials undergo a comprehensive manufacturing process encompassing impregnation, CVD, and carbonization, supported by state-of-the-art facilities. These CFC material components precisely meet customized requirements across various applications, including semiconductors and crystal growth processes.
Key Features
-Exceptional temperature resistance: Our CFC products is suitable for long-term use above 2000°C.
-Exhibits strong resistance to thermal shock: Due to their effective release of thermal stress, CFC materials are less prone to cracking during rapid temperature fluctuations. Even after repeated thermal cycles, they maintain a stable structure and have a longer life.
-Low Thermal expansion coefficient (CTE): The thermal expansion coefficient is 0.5 – 2.5 × 10⁻⁶/K, ensuring crack resistance and efficient thermal stress dissipation
-Anisotropic thermal conductivity allows optimized heat distribution through structural design
-Process complex structures: CFC materials not only retain the easy processability of carbon materials but also possess higher structural strength. Therefore, it can be processed into complex and irregular components such as large support rings, flow guide cylinders, heating structures, crucibles, etc.
Application
Semicera CFC is widely used in industrial fields with high temperatures, strong thermal cycles and high purity requirements:
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The thermal field of the monocrystalline silicon growth furnace
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The thermal field during silicon carbide (SiC) crystal growth
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Thermal field structure of CVD equipment
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Vacuum High-Temperature Furnace
We supply various key components for thermal field systems, including support rings, crucibles, crucible holders, flow guide tubes, insulation tubes, and heaters in multiple specifications.
Benefits
-Exceptional Thermal Stability: Maintains structural integrity under extremely high-temperature environments, ensuring stable performance during semiconductor and crystal growth processes.
-Outstanding Mechanical Strength: Combines high strength with low weight, reducing deformation and extending the service life of critical thermal field components.
-Superior Thermal Shock Resistance: Withstands rapid heating and cooling cycles without cracking, minimizing production interruptions and maintenance frequency.
-Longer Service Life: Offers significantly higher durability compared to traditional graphite materials, lowering replacement costs and improving operational efficiency.
-Optimized Process Efficiency: Provides excellent heat distribution and dimensional stability, contributing to more uniform crystal growth and higher production yields.
Technical Specifications
-Structure: Carbon fiber + carbon matrix (Three-dimensional structure)
-Density:1.3–1.9 g/cm³
-Compressive strength: 150–300 MPa
-Thermal expansion coefficient (CTE): 0.5 – 2.5 × 10⁻⁶/K
-Creep rate (1600–2000°C): 10⁻⁷ – 10⁻⁵ s⁻¹
