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How Focus Rings Affect Edge Etch Uniformity
In semiconductor manufacturing, plasma etching has become a core process for achieving high-precision pattern transfer. However, in mass production environments, the etch uniformity at the wafer edge remains a significant factor affecting yield. Particularly in advanced process nodes where tight ...Read more -
Practical Guide to Using and Selecting Silicon Carbide (SiC) Focus Rings
In semiconductor manufacturing, silicon carbide (SiC) has become a preferred material in high-temperature processes like CVD and MOCVD due to its exceptional thermal stability and chemical inertness. Among the critical components used in these environments, the focus ring plays a key role in stab...Read more -
Silicon Carbide (SiC) Focus Ring Selection & Use Guide
In plasma etching, deposition, and other critical vacuum processes, the wafer edge is often the most difficult region to stabilize. Edge behavior is shaped by a combination of field distribution, temperature gradients, gas-flow boundary conditions, and surface exposure—factors that can drive with...Read more -
What is Tantalum Carbide (TaC) Coating?
Tantalum carbide (TaC) coating is a high-performance ceramic surface treatment developed to meet the demanding requirements of extreme environments—particularly those involving elevated temperatures, corrosive atmospheres, and mechanical wear. Characterized by its exceptional hardness, chemical s...Read more -
How do Semiconductor and Photovoltaic Quartz Components Differ?
Semiconductor Quartz Components – Product Overview Semiconductor-grade quartz components are widely used in high-temperature and ultra-clean processing environments during chip manufacturing, such as diffusion furnaces, CVD chambers, annealing equipment, and wet cleaning systems. These components...Read more -
How Does TaC Coating Protect Graphite Components in Semiconductors?
In semiconductor manufacturing, graphite components are almost everywhere: susceptors in CVD/MOCVD chambers, heaters, graphite boats, baffles, heat shields and more are all widely made from high-purity graphite. However, as process temperatures rise, reactive gases become more aggressive, and cle...Read more -
What is the Silicon Epitaxy Process?
In modern integrated circuit and power device manufacturing, the silicon epitaxy process has become one of the fundamental key technologies. Silicon epitaxy refers to the growth of a single-crystal silicon film on the surface of a single-crystal silicon substrate, with crystal orientation and lat...Read more -
Why Choose SiC-Coated Graphite as the Susceptor for the Epitaxy Process?
In semiconductor epitaxy, the susceptor is one of the most critical process components. Beyond simply supporting the wafers mechanically, it directly influences the temperature field, gas flow distribution, and contamination level inside the reaction chamber. As a result, it has a decisive impac...Read more -
What is LED Epitaxy Susceptor?
In the rapidly evolving world of semiconductor manufacturing, especially in the production of LEDs (Light Emitting Diodes), the term “epitaxy susceptor” plays a vital role. Although the concept of epitaxy might sound complex, it is fundamental to the production of high-quality LEDs. T...Read more -
What is an LED CVD SiC Etch Ring?
The world of semiconductor manufacturing and high-tech materials is filled with specialized components that enable the performance and efficiency of cutting-edge devices. One such component that plays a critical role in the production of high-quality semiconductors, particularly in the realm of L...Read more -
High-Precision Application of SiC Carrier Plates in LED Etching
The LED (Light Emitting Diode) industry has rapidly evolved over the past few decades, driven by the increasing demand for energy-efficient, long-lasting, and high-performance lighting solutions. However, as the technology matures and application demands diversify, the manufacturing process, part...Read more -
What is Pyrolytic Carbon?
Pyrolytic carbon is a form of carbon that is produced through a high-temperature process called pyrolysis. This process involves the thermal decomposition of organic materials in an inert atmosphere, typically in the presence of a gas like methane. Pyrolytic carbon is primarily known for its uniq...Read more