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Custom CVD SiC coating application for graphite substrates: How to achieve ±2% coating uniformity and ultra-low pinhole density on a Ø210 mm substrate
Core Summary: A Swedish company specializing in GaN epitaxial technology R&D was commissioned to customize a single Ø210 mm graphite-based CVD SiC coating for its MOCVD reaction chamber, with requirements for a coating thickness uniformity ...Read more