Key Features
1.High-Temperature Resistance: Capable of stable operation at temperatures up to 1600°C, making it ideal for high-temperature etching processes in CVD applications.
2.Excellent Corrosion Resistance: The SiC material effectively resists corrosion from chlorine, fluorine, and other aggressive gases, ensuring long-term reliability.
3.Low Surface Wear: Manufactured with high-precision processing techniques, the etch ring features minimal surface wear, enhancing its lifespan and process stability.
4.High Mechanical Strength: SiC etch rings offer high mechanical strength and pressure resistance, maintaining structural stability under high-pressure conditions.
5.Precise Dimensional Control: The product has precise dimensional tolerances and high flatness, ensuring perfect compatibility with CVD equipment and preventing processing errors due to misalignment.
6.High Thermal Conductivity: The product's excellent heat management capabilities reduce thermal buildup in equipment, ensuring uniform temperature distribution during the etching process.
Applications
1.LED Manufacturing: Primarily used in the CVD growth and etching processes of LED chips, ensuring efficient production.
2.Semiconductor Manufacturing: Widely used in semiconductor etching processes.
3.Optoelectronic Devices: Suitable for the production of various optoelectronic devices, especially those requiring high performance and reliability.
Technical Specifications
| Parameter | Value |
| Material | Silicon Carbide (SiC) |
| Operating Temperature | Up to 1600°C |
| Hardness | ~9 (Mohs scale) |
| Thermal Conductivity | >120 W/m·K |
| Dimensional Tolerance | ±0.05mm |
| Corrosion Resistance | High |
Installation and Use
1.Easy Installation: The LED CVD SiC Etch Ring is designed with standard specifications, compatible with most CVD equipment, and can be easily installed, improving production efficiency.
2.Low Maintenance: Due to its exceptional durability and stability, the product requires minimal maintenance, reducing downtime and maintenance costs.
Advantages
1.Increased Yield: By reducing equipment failure rates and improving process stability, the LED CVD SiC Etch Ring significantly increases the yield and quality of LED chips.
2.Lower Operating Costs: Over the long term, its extended service life and low maintenance needs reduce the cost of equipment maintenance and operational expenses.
3.Eco-Friendly and Sustainable: The material complies with environmental standards, ensuring minimal impact on the environment during use.
Packaging and Delivery
1.The product is carefully packaged to prevent damage during transportation.
2We offer global delivery, with quick responses to customer needs and timely product delivery.
Ordering Information
If you're interested in the LED CVD SiC Etch Ring, feel free to contact our sales team for more information, pricing, and customization services. We offer a variety of specifications and sizes to meet the needs of different customers.
