The Semicera PE2061S SiC coated barrel base is a high-performance core component specifically developed for modern semiconductor epitaxy reactors. Its structure is based on high-purity isostatic graphite, which undergoes high-temperature purification and is then coated with a dense, strongly bonded layer of silicon carbide (SiC) using Semicera’s proprietary high-temperature CVD process. This advanced coating significantly enhances the component’s stability and durability in corrosive, high-temperature process environments.
This barrel base is widely used in LPE (Liquid Phase Epitaxy) systems and is especially well-suited for vertical barrel-type epitaxy reactors. These systems feature larger reaction chambers and higher wafer loading capacity, making demands on thermal field stability and gas flow uniformity even more stringent. Semicera’s barrel base is thoughtfully engineered to optimize laminar gas flow. Its cylindrical design naturally facilitates controlled vertical flow channels within the chamber, effectively reducing turbulence, enhancing uniform reactant distribution, and minimizing particle accumulation and byproduct deposition—ultimately ensuring a cleaner, more controlled environment for epitaxial growth.
Unlike traditional uncoated graphite structures, which are prone to surface degradation such as powdering, oxidation, and chemical corrosion, Semicera’s SiC coating maintains excellent structural stability at elevated temperatures. It also serves as a protective barrier against aggressive species like hydrogen and chlorosilanes present in the reaction atmosphere, preventing erosion of the graphite substrate. In addition, the dense SiC layer offers strong resistance to gas flow erosion and physical wear during chemical cleaning, significantly extending the component's service life, reducing replacement frequency, and improving overall equipment utilization.
As one of the few domestic manufacturers capable of mass production of CVD SiC coatings, Semicera continuously refines its process parameters and material systems. This has led to improvements in coating density, interfacial adhesion, and long-term consistency. We also offer flexible customization based on specific customer requirements—including reactor configuration, gas chemistry, and cleaning protocols—to deliver optimized solutions across various applications.
With a mature production system and reliable batch delivery capabilities, we offer not only high-performance products but also cost-effective pricing strategies. This allows our customers to control operating costs without compromising product performance. Whether for new production lines, retrofit upgrades, or long-term consumable replacement, Semicera’s SiC coated barrel base provides an integrated, dependable solution—helping you enhance production efficiency, stability, and long-term reliability.
