Silicon carbide wafer grinding disk, Ras0.2um

Short Description:

Silicon carbide grinding disc thermal expansion coefficient is small, high strength, high hardness, long service life, low cost, and the thermal expansion coefficient is basically the same as silicon wafer, the use of silicon carbide grinding disc can solve the high requirements of grinding and polishing, improve the grinding quality and efficiency. Mainly used in large-scale integrated circuit silicon substrate and photovoltaic industry silicon wafer polishing.


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Silicon carbide wafer grinding9

Grinding disc is an important process equipment for the production of silicon wafers for ultra-large scale integrated circuits in semiconductor industry. Usually used cast iron or carbon steel grinding disc has low service life and large thermal expansion coefficient. In the process of processing silicon wafers, especially in the process of high-speed grinding or polishing, the flatness and parallelism of silicon wafers are difficult to ensure because of the wear and thermal deformation of the grinding disc.

The grinding disk of silicon carbide ceramic can be grinded and polished at high speed because of the high hardness and small wear of the grinding disk, and the thermal expansion coefficient is basically the same as that of the silicon wafer. Especially in recent years, the size of silicon wafer is getting larger and larger, which puts forward higher requirements for the quality and efficiency of silicon wafer grinding.

Silicon carbide wafer grinding7
Silicon carbide wafer grinding8

The use of silicon carbide ceramic grinding disc will greatly improve the quality and efficiency of silicon wafer grinding. At the same time, the silicon carbide ceramic grinding disk can also be used to grind and polish the plane of other materials such as flake or block objects. With the development of industrialization, especially the implementation of the ISO14000 international standard, higher requirements have been put forward for the transport of liquids that are not conducive to environmental protection.

One of the most important characteristics of silicon carbide ceramics is its high temperature strength, that is, the strength is basically not reduced at 1600 degrees, and the oxidation resistance is very good, so it can be used in high temperature structural parts. Such as the top plate of high temperature furnace, support, and high temperature experiment fixtures.

Comparison of SIC ceramic materials
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Semicera Energy Technology Co., Ltd is a professional research, development, production and sales of silicon carbide ceramic products. Since its establishment in 2016, Semicera Energy has mastered isostatic pressing molding process, thousand pressing molding process, grouting molding process and vacuum extrusion molding process. Our company uses 6 silicon carbide ceramic sintering production lines, has 8 CNC, 6 precision grinding machines, can also provide you with silicon carbide ceramic sintered products, but also can provide silicon carbide ceramics, alumina ceramics, aluminum nitride ceramics, zirconia ceramics processing services.

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