Large size recrystallized silicon carbide wafer boat

Short Description:

Semicera Energy Technology Co., Ltd. is a high-tech enterprise established in China, We are professional supply Semiconductor industry recrystallized silicon carbide crystal boat nufacturer and supplier.


Product Detail

Product Tags

Properties of recrystallized silicon carbide

Recrystallized silicon carbide (R-SiC) is a high-performance material with hardness second only to diamond, which is formed at a high temperature above 2000℃. It retains many excellent properties of SiC, such as high temperature strength, strong corrosion resistance, excellent oxidation resistance, good thermal shock resistance and so on.

● Excellent mechanical properties. Recrystallized silicon carbide has higher strength and stiffness than carbon fiber, high impact resistance, can play a good performance in extreme temperature environments, can play a better counterbalance performance in a variety of situations. In addition, it also has good flexibility and is not easily damaged by stretching and bending, which greatly improves its performance.

● High corrosion resistance. Recrystallized silicon carbide has high corrosion resistance to a variety of media, can prevent the erosion of a variety of corrosive media, can maintain its mechanical properties for a long time, has a strong adhesion, so that it has a longer service life. In addition, it also has good thermal stability, can adapt to a certain range of temperature changes, improve its application effect.

● Sintering does not shrink. Because the sintering process does not shrink, no residual stress will cause deformation or cracking of the product, and parts with complex shapes and high precision can be prepared.

Silicon carbide crystal boat (2)
Silicon carbide crystal boat (3)
Silicon carbide crystal boat (4)

 Material Datasheet

材料Material R-SiC
使用温度Working temperature (°C) 1600°C ( 氧化气氛Oxidizing environment)

1700°C ( 还原气氛Reducing environment)

SiC含量SiC content (%) > 99
自由Si 含量Free Si content (%) < 0.1
体积密度Bulk density (g/cm3) 2.60-2.70
气孔率Apparent porosity (%) < 16
抗压强度Crushing strength (MPa) > 600
常温抗弯强度Cold bending strength (MPa) 80-90 (20°C)
高温抗弯强度Hot bending strength (MPa) 90-100 (1400°C)
热膨胀系数

Thermal expansion coefficient @1500°C (10-6/°C)

4.70
导热系数Thermal conductivity @1200°C (W/m•K) 23
杨氏模量Elastic modulus (GPa) 240
抗热震性Thermal shock resistance 很好Extremely good
Silicon Carbide Wafer Boat (6)
Silicon Carbide Wafer Boat (4)
Silicon Carbide Wafer Boat (5)
Silicon Carbide Wafer Boat (1)
1111111

  • Previous:
  • Next: