Corrosion-resistant silicon carbide Ceramic effector

Short Description:

WeiTai Energy Technology Co., Ltd. is a leading supplier specializing in wafer and advanced semiconductor consumables. We are dedicated to providing high-quality, reliable, and innovative products to semiconductor manufacturing, photovoltaic industry and other related fields.

Our product line includes SiC/TaC coated graphite products and ceramic products, encompassing various materials such as silicon carbide, silicon nitride, and aluminum oxide and etc.

As a trusted supplier, we understand the importance of consumables in the manufacturing process, and we are committed to delivering products that meet the highest quality standards to fulfill our customers’ needs. 


Product Detail

Product Tags

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Characteristics and advantages

1.Precise dimensions and thermal stability

2.High specific stiffness and excellent thermal uniformity, long-term use is not easy to bend deformation;

3.It has a smooth surface and good wear resistance, thus safely handling the chip without particle contamination.

4.Silicon carbide resistivity in 106-108Ω, non-magnetic, in line with anti-ESD specification requirements; It can prevent the accumulation of static electricity on the surface of the chip

5.Good thermal conductivity, low expansion coefficient.

Robot Arm Effector
SiC End Effector
Comparison of SIC ceramic materials
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