High purity quartz crystal boat can be customized

Short Description:

In the semiconductor IC manufacturing process, it is often necessary to use a tool for chip transfer, cleaning and processing, the tool that carries the chip is generally called the wafer boat, which will be provided with a number of wafer slots, each wafer slot is used to place a wafer. In the manufacturing process of semiconductor wafers, the diffusion process of the furnace tube is one of the basic processes. In the diffusion process, multiple wafers are first placed on a quartz crystal boat, and then the quartz crystal boat is placed in the furnace tube for batch manufacturing.


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Advantages of quartz are as follows:

1, high temperature resistance. The softening point temperature of quartz glass is about 1730 ° C, which can be used for a long time at 1150 ° C, and the maximum temperature for a short time can reach 1450 ° C.

2, corrosion resistance. In addition to hydrofluoric acid, high purity quartz almost does not react with other acid substances, at high temperatures, it can resist sulfuric acid, nitric acid, hydrochloric acid, aqua royalty, neutral salts, carbon and sulfur erosion. Its acid resistance is 30 times that of ceramics, 150 times that of stainless steel, especially its chemical stability at high temperatures, which is unmatched by any other engineering material.

3, good thermal stability. The coefficient of thermal expansion of high purity quartz is very small, can withstand intense temperature changes, the high purity quartz is heated to about 1100℃, and will not burst into normal temperature water.

4, good light transmission performance. High purity quartz has good light transmission performance in the entire spectral band from ultraviolet to infrared, visible light transmittance of more than 93%, especially in the ultraviolet spectral region, ~ large light transmittance of more than 80%.

5, good electrical insulation performance. The resistance value of high-purity quartz is equivalent to 10,000 times that of ordinary quartz glass, which is an excellent electrical insulation material and has good electrical properties even at high temperatures.

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In order to meet customer needs, Semicera Energy can produce a variety of quartz products, relying on the three core technical advantages of precision processing technology, welding technology, surface treatment (cleaning) technology and the support of professional technical team with global vision, tailor-made high-quality products for customers.

 

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